Integration of Functional Polymers in Organic Mems for Sensing Applications

Hitherto the MEMS field has evolved with the semiconductor industry where silicon is the predominant material. As the MEMS sector expands and diversifies, research focuses on new optimised materials with respect to the functional requirements (e.g. low cost, flexibility, optical transparency, biocompatibility and large surface) of future electronic devices [1]. To this end, substituting rigid inorganic material by soft organic materials offers basic economic and ecological benefits as well as new integrated functionalities to MEMS products. The different electrical and chemical properties of organic polymers have opened the way for a new research and technology field related to MEMS devices. This work presents (1) the wafer-level fabrication of organic MEMS resonators, (2) the integration of top carbon nanotube/SU8 epoxy resin (CNT/SU-8) nanocomposite piezoresistive transducers onto these devices and (3) their applications as specific and selective bio-sensors by means of molecularly imprinted polymer (MIP).